齐凤阳,陈 强.MPECVD中氧化硅阻隔层性能的研究[J].包装工程,2012,33(1):1-4.
QI Feng-yang,CHEN Qiang.Study of the Properties of SiO-x Barrier Coatings by MPECVD[J].Packaging Engineering,2012,33(1):1-4. |
| MPECVD中氧化硅阻隔层性能的研究 |
| Study of the Properties of SiO-x Barrier Coatings by MPECVD |
| 投稿时间：2011-10-24 修订日期：2012-01-10 |
| DOI： |
| 中文关键词: SiO-x阻隔层 薄膜颜色 阻隔性能 磁增强等离子体化学气相沉积 |
| 英文关键词: SiO-x barrier layer film color barrier properties magnetized plasma enhanced chemical vapor deposition |
| 基金项目:国家自然科学基金资助项目（11175024） |
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| 中文摘要: |
| 介绍了用磁增强等离子体化学气相沉积技术在连续（Roll-to-Roll）系统中，在PET薄膜表面沉积纳米SiO-x阻隔层薄膜的工艺。研究了不同工艺条件下，薄膜的阻隔性能、颜色变化及其影响因素。实验得到：在单体和氧气的混合反应气体中，提高氧气的比例有利于增加薄膜透明性，并且得到的氧化硅膜由黄褐色趋近于无色透明。通过红外光谱仪对薄膜的成分进行了分析，用分光光度计和紫外可见分光光度计测量了薄膜颜色和透明性变化,分析了其影响产生的机理。 |
| 英文摘要: |
| The preparation of SiO-x coating as barrier layer deposited on PET surface by magnetized plasma enhanced chemical vapor deposition (MPECVD) through the roll-to-roll process was introduced. The factors influencing barrier performance and color change of the film under different technological conditions were studied. The result showed that PET coated with SiO-x is more transparent in high oxygen concentration, and the SiO-x coatings are near colorless. The composition and structure of the coatings were analyzed by Fourier transform infrared (FTIR), and the color degree and light transmittance were analyzed by spectrophotometer and UV-Visible spectroscopy respectively. The mechanism of the influences was analyzed. |
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