于宁波,黄中玉.硅片机器人大臂结构多目标拓扑优化设计[J].包装工程,2020,41(7):209-216.
YU Ning-bo,HUANG Zhong-yu.Multi-objective Topological Optimization Design of the Big Arm of Silicon Wafer Robot[J].Packaging Engineering,2020,41(7):209-216. |
| 硅片机器人大臂结构多目标拓扑优化设计 |
| Multi-objective Topological Optimization Design of the Big Arm of Silicon Wafer Robot |
| 投稿时间：2019-04-13 修订日期：2020-04-10 |
| DOI：10.19554/j.cnki.1001-3563.2020.07.030 |
| 中文关键词: 硅片机器人大臂 多目标优化设计 层次分析法 折衷规划法 |
| 英文关键词: big arm of silicon wafer robot multi-objective optimization design analytic hierarchy process compromise programming method |
| 基金项目:湖北省教育厅科学技术研究项目（B2016553）；湖北省教育厅品牌专业建设项目（鄂教职成[2014]8号） |
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| 中文摘要: |
| 目的 为了改善硅片机器人结构的静、动力学性能，实现结构的轻量化设计。方法 引入多目标优化理论，并结合层次分析法，实现硅片机器人大臂的结构优化设计。依据设计方案分析大臂的受力情况，采用固体各向同性材料惩罚模型分别构建多目标优化数值模型，并运用优化准则法进行优化求解。引入数理统计中的层次分析法确定各子目标函数的权重比，依据折衷规划组合方法构造关于静刚度和一阶固有频率的总目标函数。结果 优化结果可知，大臂的柔度从26.890 mm/N降到13.221 mm/N，一阶固有频率从556.86 Hz增加到629.90 Hz，结构质量从1.48 kg减少到0.583 kg。结论 多目标优化结果表明，基于多目标优化理论对硅片机器人大臂结构的改进设计，不仅有效地提高了其静刚度特性，一阶固有频率的提高说明大臂结构能抑制振动能力的提升，还实现了大臂结构轻量化设计。层次分析法的引入为多目标优化问题中各子目标函数的重要性提供了客观的理论依据。 |
| 英文摘要: |
| The work aims to improve the static and dynamic structural performance of the silicon wafer robot and realize the lightweight structural design. The multi-objective optimization theory combined with the analytic hierarchy process was introduced to realize the structural optimization design of the robot's big arm. The load condition of big arm was analyzed in terms of the design scheme, the solid isotropic microstructures with penalization (SMIP) model was used to build the multi-objective optimization numerical model, and the optimization solution was done via optimality criteria. The analytic hierarchy process in the mathematical statistics was introduced to determine the weight ratio of sub-objective functions. The overall objective function about static stiffness and first-order natural frequency was constructed according to the compromise programming method. The optimization results analyzed that the compliance of the big arm reduced from 26.890 mm/N to 13.221 mm/N, the first-order natural frequency increased from 556.86 Hz to 629.90 Hz, and the structural mass decreased from 1.48 kg to 0.583 kg. The multi-objective optimization results show that, the improved design of the big arm of silicon wafer robot based on the multi-objective optimization theory not only improves the static stiffness effectively as the enhance of the first-order natural frequency indicates that the vibration suppression ability of the big arm is improved, but also realizes the lightweight design of the big arm. The introduction of analytic hierarchy process provides impersonal theoretical basis for the importance of sub-objective functions in multi-objective optimization problems. |
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