This paper aims to sort out and analyze the research related to human errors in industrial system monitoring operations to understand the status quo and development trends of its research. Through the literature research method, sort out and define the concept of human error, and summarize the nature and characteristics of human error; through the study of the evolution of monitoring operations, summarize the human characteristics of the current industrial system digital monitoring operations; starting from nuclear power plants, aviation, rail transit, power systems and other industries, analyze the cognitive behavior model of monitoring operators, and explore the mechanism of human error; sort out the identification method of human error and analyze its applicability in the monitoring operation of industrial systems; identify the influencing factors of human error in monitoring operations. With the development of digital monitoring interfaces and changes in the context, the cognitive process and behavioral response methods of monitoring operators have changed. It is necessary to continuously enrich the theory of human error and explore the mechanism of human error, so as to help people in industrial system monitoring operations. Provide a theoretical basis for management and control due to errors.